Scanning Electron Microscopy/

Energy Dispersive X-ray Spectroscopy


Scanning Electron Microscopy/ Energy Dispersive X-Ray  Spectroscopy

Field Emission Scanning Electron Microscopy (SEM) is an imaging technique in which a focused electron beam is scanned on the surface of a sample to generate secondary and backscattered electrons.  Images formed by these electrons provide topographical and structural information of the sample.  In SEM EDS mode, X-rays generated during electron scanning can be collected by an attached Si:Li detector to generate spectra of local composition as well as linescans and elemental maps of structures.  Careful sample preparation allows examination of metals, semiconductors, ceramics, and some polymers; accurate quantitative analysis is possible with the use of standards and simulation software.



  • FEI XL50 w/ Noran System 6 EDS detector
  • Hitachi S4800
  • Zeiss Ultra 55

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