Scanning Electron Microscopy/
Energy Dispersive X-ray Spectroscopy
Scanning Electron Microscopy/ Energy Dispersive X-Ray Spectroscopy
Field Emission Scanning Electron Microscopy (SEM) is an imaging technique in which a focused electron beam is scanned on the surface of a sample to generate secondary and backscattered electrons. Images formed by these electrons provide topographical and structural information of the sample. In SEM EDS mode, X-rays generated during electron scanning can be collected by an attached Si:Li detector to generate spectra of local composition as well as linescans and elemental maps of structures. Careful sample preparation allows examination of metals, semiconductors, ceramics, and some polymers; accurate quantitative analysis is possible with the use of standards and simulation software.
- FEI XL50 w/ Noran System 6 EDS detector
- Hitachi S4800
- Zeiss Ultra 55