Nuclear Reaction Analysis

Nuclear Reaction Analysis uses a high-energy (MeV) ion beam to bombard the sample surface. Elastic and inelastic collisions provide chemical information, i.e. the atomic number (Z) of the sample material and thickness based on the scattering depth.  Ion beam analyses measure thin-films deposited on substrates like silicon or bulk crystalline materials. These measurements are non-destructive, and standard-less.

NRA is a depth profiling measurement of bulk materials.

Instruments: